Axcelis Announces Timing & Availability of Third Quarter 2009 Results and Conference Call

Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced that the company will be hosting a conference call on Thursday, November 5, 2009 at 5:00 pm ET. The purpose of the call is to discuss third quarter results for fiscal year 2009. The call will be available to interested listeners via an audio webcast that can be accessed through Axcelis' home page at www.axcelis.com, or by dialing 1-888-680-0892 (1-617-213-4858 outside North America). Participants calling into the conference call will be requested to provide the company name, Axcelis Technologies and passcode: 99888481. A webcast replay will be available from 8 pm ET on November 5, 2009 until 11:59 pm ET on February 5, 2010. A telephone replay will be available from 8:00 pm ET on November 5, 2009 until 11:59 pm ET on February 5, 2010. Dial 1-888-286-8010 (1-617-801-6888 outside North America), and enter conference ID code# 71293614.

Axcelis Technologies, Inc. (Nasdaq: ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.